Way to the Innovation of Various Applications with Ion Implantation, Thin Film Deposition, Analysis and Advanced Facilities.

ION TECHNOLOGY CENTER


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Analysis

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Analysis

Analytical services are available including on site client's observation.
Major analytical tools include HR-TEM, Q-pole type SIMS, micro-ESCA and RAMAN. Expertise and know-hows exist in micro and nano level surface analysis that will provide the most reliable data with short period of time. Technical advice and consulting on unknown materials is also available.

Service
Analytical services

Analysis is conducted with the sample provided by a client and the analysis report is delivered. Appropriate analysis approaches will be proposed on request.

On site Observation Analysis

Client's observation on site analysis is available. Client can confirm the analysis conditions, procedures and the results on site.

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Equipment
Surface Analysis

Secondary Ion Mass Spectrometry (SIMS)

Electron Spectroscopy for Chemical Analysis (ESCA)

X-Ray Photoelectron Spectroscopy (XPS)

Raman Spectroscopy (RAMAN)

Rutherford BackScattering Spectronetry (RBS)

Micro-Region Morphology Observation

High-Resolution Transmission Electron Microscopy (HR-TEM)

High-Resolution Scaning Electron Microscopy (HR-SEM)

Nano Indentation

Atomic Force Microscopy (AFM)

X-Ray Diffraction (XRD)

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Field of Interest
Information to acquire
Field of Interest Equipment Information to Acquire
Semiconductor
Thin Film
Device
Sample for Ion Implantation
HR-TEM Atomic level morphology observation, Crystalline structure, Dislocation density, Film thickness
HR-SEM Surface structure, Cross sectional structure (Film thickness)
XRD Crystallinity (Plane direction), Multilayer periodic structure
XPS/ESCA Surface composition, Chemical state, Depth profile
SIMS Impurity concentration, Depth profile
RAMAN Chemical state, Stress strain
RBS Composition , Crystallinity
Nano Indentation Surface modulus, Hardness
Functional Thin Film
Surface Treatment with DLC etc
Coating
HR-TEM Surface damage observation
HR-SEM Surface morphology
XPS/ESCA Composition, Chemical state, Depth profile
SIMS Impurity concentration, Depth profile
RBS/ERDA Composition elements, Composition
Material, Electronic Device
Powder (Particle)
Carbon Nano-Tube, Graphite
Printed Circuit Board
HR-TEM Particle (Grain) size, Crystalline structure
HR-SEM Particle (Grain) size, Surface morphology (Aggregation)
XRD Crystalline structure
XPS/ESCA Composition, Surface analysis
RAMAN Chemical state
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