Equipment | Ion Technology Center Co. Ltd.

Environment and Equipment

Equipments
Environment

Ion Technology Center is located at Tsuda Science Hills developed as a center of Kansai Science City. The beautiful view of Hirakata city from the hill top is very attractive for the most advanced research and development activities. The facility has much space of lobby and offices and the research laboratories for ion implantation and thin film coating with clean room specification compatibility.

Medium Current Ion Implantation

: 200KeV(B) Ion Implantation

: 200KeV(C) Ion Implantation

: 400KeV Ion Implantation

High Energy Ion Implantation

: 8MeV Ion Implantation

Surface Analysis

Secondary Ion Mass Spectrometetry (SIMS)

Electron Spectroscopy for Chemical Analysis (ESCA) X-Ray Photoelectron Spectroscopy (XPS)

Raman Spectroscopy (RAMAN)

Rutherford BackScattering Spectronetry (RBS)

Micro-Region Morphology Observation

High-Resolution Transmission Electron Microscopy (HR-TEM)

High-Resolution Scaning Electron Microscopy (HR-SEM)

Nano Indentation

Atomic Force Microscope (AFM)

X-Ray Diffraction (XRD)

Thermal Analysis

: Differential Thermal Gravimetry (TGD)

: Differential Scanning Calorimetry (DSC)

: Specific Heat Capacity Measurement (SHM)

Plasma Based Ion Implantation & Deposition (PBII)

Magnetron Sputtering

Ion Plating (IP)

Ion Beam Sputtering (IBS)

Unbalanced Magnetron Sputtering (UBMS)